Features

The ATLEX series of short pulse excimer lasers uses state-of-the-art metal-ceramic technology and creates powerful new concepts in equipment and design of the discharge process. The patented OPEC* technique of intensified ultra-fast preionization provides highly efficient laser performance with pulse duration of a few nanoseconds and enhanced reliability of all high voltage components

* OPEC - Optimised Preionisation Electrical Circuit

	OPEC – ultra-fast preionization technique
	Laser tube volume less than 2.5 litres
	Total metal-ceramic tube
	Air-cooled; even up to 500 Hz rep. rate
	RS-485 interface for system integration
	Meets European CE standard
	Handheld controller

Metal ceramic tube

The metal-ceramic laser tube is entirely manufactured of halogen and UV-resistant aluminium alloy and ceramics. A considerably lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes.

In addition, an internal dust particle filter, significantly reducing window contamination, is fitted as standard.

The vessel geometry provides symmetrical cooling resulting in excellent beam quality and beam pointing stability.

OPEC preionization

	Excellent beam homogeneity
	Low beam divergence
	Reduced high voltage
	Improved gas purity and gas lifetime
	Long window cleaning and laser tube service intervals

Laser controller

A newly-designed microprocessor-based control unit provides the user with numerous useful functions of the laser including:

	Stabilisation of the pulse energy/average power
	Pulse repetition rate
	Trigger source
	Trigger mode (burst scan, continuous, single shot)
	HV adjustment
	Automatic/partial gas refilling

The laser can be controlled by: ATL software on an IBM-compatible PC (optional), a hand held remote control or via the RS-485 interface.

Optics holder

For cleaning purposes the cassette-mounted optics can easily be removed and replaced. The mechanically stable construction of the rotating optic cassette ensures that alignment will be maintained during optics removal or replacement and that the laser tube remains sealed during the procedure.

Specifications

All specifications are typical data and subject to change without notice due to product improvements.

1. Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2. Typical value, FWHM
3. Measured at max. high voltage