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Nanopositioning Systems
If smallest parts or samples have to be moved or positioned with
nanometer precision in the millimetre range, nanopositioning systems with piezo
inertial drive are used. Very compact actuators with appropriate control units
are available for rotational and linear movements.
The compatibility to each other allows the assembly of multi-axes
combinations for complex movements.
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 Nano Linear Stage NLV 24-7
The OWIS Nano Linear Stage NLV 24-7 is equipped with a piezo
inertial drive. The speed of the stepper modus is up to 0.3mm/s. The smallest
step is about 200 nm. The NLV 24-7 is also available with an integrated
measuring system by the same dimensions. The combination of the nanopositioner
on top of the linear stage is possible without adapter plate. In order to
firmly assembly the NLV 24-7 you can use the mounting plate NMP 50 (grid
dimensions 50 mm) which is avaitable as an accessory. To actuate the NLV 24-7,
the manual control unit NHS06 is available. With it you can actuate two groups
of three nanopositioners. The NHS 06 has a USB interface, to actuate the linear
stage with the delivered software. For closed loop operation, an integrated
measuring system and the evaluation unit MSAW is required.
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Increments of 200 nm and 600 nm with manual control unit NHS
06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of 100
nm |
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Versions for use in vacuum available |
 Nano Linear Stage PT 30-5
The OWIS Nano Linear Stage PT 30-5 is equipped with a piezo
inertial drive. The speed of the stepper modus is up to 0,3mm/s. The smallest
step is about 300 nm. The PT 30-5 is also available with an integrated
measuring system by the same dimensions. In order to firmly assembly the PT
30-5 you can use the mounting plate NMP 50 (grid dimensions 50 mm) which is
available as an accessory. To actuate the PT 30-5, the manual control unit
NHS06 is available. With it you can actuate two groups of three
nanopositioners. The NHS 06 has a USB interface, to actuate the linear stage
with the delivered software. For closed loop operation, an integrated measuring
system and the evaluation unit MSAW is required.
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Increments of 300 nm and 800 nm with manual control unit NHS
06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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zero backlash ball bearing guides |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of 100
nm |
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Versions for use in vacuum available |
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 Nano Elevator Stage NHV 24-6
The OWIS Nano Elevator Stage NHV 24-6 is equipped with a piezo
inertial drive. The speed of the stepper modus is up to approx.0.3 mm / s. The
smallest step is about 200 nm. The NHV 24-6 is also available with an
integrated measuring system by the same dimensions. The combination of the
nanopositioner on top of the elevator stage is possible without an adapter
plate. In order to firmly assemble the NHV 24-6 you can use the mounting plate
NMP 50 (grid dimensions 50 mm) which is available as an accessory. To actuate
the NHV 24-6, the manual control unit NHS06 is available. With it you can
actuate two groups of three nanopositioners. The NHS 06 has a USB interface to
actuate the elevator stage with the delivered software. For closed loop
operation an integrated measuring system and the evaluation unit MSAW is
required.
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Increments of 200 nm and 700 nm with manual control unit NHS
06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of 100
nm |
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Versions for use in vacuum available |
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 Nano Rotary Stage NDT 24-30
The OWIS Nano Rotary Stage NDT 24-30 is equipped with a piezo
inertial drive. The adjustment area is unlimited. The speed is max. 0.1 rad/s,
the smallest step angle is about 40 µrad. The NDT 24-30 is also available
with an integrated measuring system by the same dimensions. In order to firmly
assembly the NDT 24-30 you can use the mounting plate NMP 50 (grid dimensions
50 mm) which is available as an accessory. To actuate the NDT 24-30, the manual
control unit NHS06 is available. With it you can actuate two groups of three
nanopositioners. The NHS 06 has a USB interface, to actuate the rotary stage
with the delivered software. For closed loop operation, an integrated measuring
system and the evaluation unit MSAW is required.
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Increments of 40 µrad and 90 µrad with manual
control unit NHS 06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of about 8
µrad |
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Versions for use in vacuum available |
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 Nano-Goniometer NAGO-P24-8
The OWIS Nano Goniometer NAGO P 24-8 is equipped with a piezo
inertial drive. The adjustment range is 0.11 rad by speed about 20 mrad/s. The
smallest step angle is about 2 µrad. The distance between the center of
rotation to bottom is 85mm. Combined with the Nano-Goniometer NAGO-T24-8 they
are building a theta-phi goniometer. The NAGO-P 24-8 is also available with an
integrated measuring system by the same dimensions. The combination of the
nanopositioner on top of the goniometer is possible without adapter plate. In
order to firmly assembly the NAGO P 24-8 you can use the mounting plate NMP 50
(grid dimensions 50 mm) which is available as an accessory. To actuate the NAGO
P 24-8, the manual control unit NHS06 is available. With it you can actuate two
groups of three nanopositioners. The NHS 06 has a USB interface, to actuate the
goniometer with the delivered software. For closed loop operation, an
integrated measuring system and the evaluation unit MSAW is required.
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Increments of 2 µrad and 6 µrad with manual
control unit NHS 06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of about 3
µrad |
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Versions for use in vacuum available |
 Nano-Goniometer NAGO-T24-8
The OWIS Nano Goniometer NAGO T 24-8 is equipped with a piezo
inertial drive. The adjustment range is 0.11 rad by speed about 20 mrad/s. The
smallest step angle is about 2 µrad. The distance between the center of
rotation and bottom is 70,5 mm. Combined with the Nano-Goniometer NAGO P 24-8
they are building a theta-phi Goniometer. The NAGO-T24-8 is also available with
an integrated measuring system by the same dimensions. The combination of the
nanopositioner on top of the goniometer is possible without adapter plate. In
order to firmly assembly the NAGO T 24-8 you can use the mounting plate NMP 50
(grid dimensions 50 mm) which is available as an accessory. To actuate the NAGO
T 24-8, the manual control unit NHS06 is available. With it you can actuate two
groups of three nanopositioners. The NHS 06 has a USB interface, to actuate the
goniometer with the delivered software. For closed loop operation, an
integrated measuring system and the evaluation unit MSAW is required.
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Increments of 2 µrad and 6 µrad with manual
control unit NHS 06 |
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High speed in full step motion |
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Main body and carriage made of wear resistant aluminium
alloy, black anodized |
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High linearity of the step sizes at constant control voltage
and frequency |
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Optional measuring system with a resolution of about 3
µrad |
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Versions for use in vacuum available |
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 Manual Control Unit NHS 06
The handy and lightweight control pad is suitable for all OWIS
Nanopositioning System. Up to 6 axes, which can be controlled in two groups of
each 3 axes. There are 3 different frequencies and 2 different step widths
selectable, therefore six different speeds. It is possible to control the units
with the provided software. The communication between PC and control unit is
done via USB 1.1. An external power supply is also part of the delivery.
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Up to 6 axes controllable |
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3 output frequencies, switchable |
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2 output amplitudes, switchable |
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With power supply |
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Easy to handle |
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PC interface USB1.1 |
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With software |
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Further Information
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